Patents & Trademarks

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Equipment Solutions Patents Equipment Solutions PatentsEquipment Solutions holds several US patents that cover a diverse collection of methods and processes related to its business.  Please refer to the US Patent and Trademark Office for information related to those patents.  Applications may be actively being filed so it is strongly recommended that you check this source frequently.

Patents / Publication

Patents  # Year of Issued Title
7,364,145 2008 High stiffness flexure
6,931,938 2005 Measuring pressure exerted by a rigid surface
6,885,116 2005 Moving coil linear motor positioning stage with a concentric aperture
6,031,597 2000 Method and apparatus for transfer of a reticle pattern onto a substrate by scanning
5,883,703 1999 Methods and apparatus for detecting and compensating for focus errors in a photolithography tool
5,835,195 1998 Method and apparatus for transfer of a reticle pattern onto a substrate by scanning
5,298,939 1994 Method and apparatus for transfer of a reticle pattern onto a substrate by scanning
4,839,679 1989 Dual voice coil shutter
4,590,635 1986 Machine for floor maintenance
4,567,391 1986 Permanent magnet disc rotor machine
4,443,906 1984 Machine for floor maintenance